Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy
نویسندگان
چکیده
منابع مشابه
An Imaging Displacement Sensor with Nanometer Accuracy
An imaging displacement sensor (IDS) has been developed that can measure the displacement with an accuracy of 30 nm in 0.03 s with the precision improving to 1 nm for averaging times of 100 s. The IDS consists simply of a light emitting diode (LED) pinhole collimator and a charge-coupled device (CCD) camera chip. The position accuracy is better than 0.05% over the few mm CCD size with deviation...
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INTRODUCTION Laser interferometry has become a staple of SItraceable displacement measurement techniques. This, combined with decreasing cost per channel, miniaturization, and a multitude of commercially available off-the-shelf systems, creates ever more attractive applications unheard-of a few years ago. Although significant efforts have been made to shrink the size of optical components neces...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.003000